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MMA7261QR2 Datasheet(PDF) 4 Page - Freescale Semiconductor, Inc |
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MMA7261QR2 Datasheet(HTML) 4 Page - Freescale Semiconductor, Inc |
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4 / 8 page  Analog Integrated Circuit Device Data 4 Freescale Semiconductor MMA7261Q PRINCIPLE OF OPERATION The Freescale accelerometer is a surface-micromachined integrated-circuit accelerometer. The device consists of two surface micromachined capacitive sensing cells (g-cell) and a signal conditioning ASIC contained in a single integrated circuit package. The sensing elements are sealed hermetically at the wafer level using a bulk micromachined cap wafer. The g-cell is a mechanical structure formed from semiconductor materials (postillion) using semiconductor processes (masking and etching). It can be modeled as a set of beams attached to a movable central mass that move between fixed beams. The movable beams can be deflected from their rest position by subjecting the system to an acceleration (Figure 3). As the beams attached to the central mass move, the distance from them to the fixed beams on one side will increase by the same amount that the distance to the fixed beams on the other side decreases. The change in distance is a measure of acceleration. The g-cell beams form two back-to-back capacitors (Figure 3). As the center beam moves with acceleration, the distance between the beams changes and each capacitor's value will change, (C = A ε/D). Where A is the area of the beam, ε is the dielectric constant, and D is the distance between the beams. The ASIC uses switched capacitor techniques to measure the g-cell capacitors and extract the acceleration data from the difference between the two capacitors. The ASIC also signal conditions and filters (switched capacitor) the signal, providing a high level output voltage that is ratiometric and proportional to acceleration. Figure 3. Simplified Transducer Physical Model SPECIAL FEATURES g-Select The g-Select feature allows for the selection among 4 sensitivities present in the device. Depending on the logic input placed on pins 1 and 2, the device internal gain will be changed allowing it to function with a 2.5g, 3.3g, 6.7g, or 10g sensitivity (Table 3). This feature is ideal when a product has applications requiring different sensitivities for optimum performance. The sensitivity can be changed at anytime during the operation of the product. The g-Select1 and g- Select2 pins can be left unconnected for applications requiring only a 2.5g sensitivity as the device has an internal pull-down to keep it at that sensitivity (480mV/g). Sleep Mode The 3 axis accelerometer provides a Sleep Mode that is ideal for battery operated products. When Sleep Mode is active, the device outputs are turned off, providing significant reduction of operating current. A low input signal on pin 12 (Sleep Mode) will place the device in this mode and reduce the current to 3uA typ. For lower power consumption, it is recommended to set g-Select1 and g-Select2 to 2.5g mode. By placing a high input signal on pin 12, the device will resume to normal mode of operation. Filtering The 3 axis accelerometer contains onboard single-pole switched capacitor filters. Because the filter is realized using switched capacitor techniques, there is no requirement for external passive components (resistors and capacitors) to set the cut-off frequency. Ratiometricity Ratiometricity simply means the output offset voltage and sensitivity will scale linearly with applied supply voltage. That is, as supply voltage is increased, the sensitivity and offset increase linearly; as supply voltage decreases, offset and sensitivity decrease linearly. This is a key feature when interfacing to a microcontroller or an A/D converter because it provides system level cancellation of supply induced errors in the analog to digital conversion process. Acceleration Table 3. g-Select pin Descriptions g-Select2 g-Select1 g-Range Sensitivity 0 0 2.5g 480mV/g 0 1 3.3g 360mV/g 1 0 6.7g 180mV/g 1 1 10g 120mV/g |
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