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SUV-2001NIL Datasheet(PDF) 1 Page - PerkinElmer Optoelectronics |
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SUV-2001NIL Datasheet(HTML) 1 Page - PerkinElmer Optoelectronics |
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1 / 2 page  . www.perkinelmer.com/opto HSH2001NIELO Lamps for Photolithography Lighting Imaging Telecom Mercury Short Arc Lamps Applications • Microlithography Description PerkinElmer Optoelectronics is a leading manufacturer of mercury short arc lamps ranging in output power from 1000 to 8000 watts. These lamps are used in the production of printed circuit boards, liquid crystal displays and semiconductors. The HSH Series lamps are used worldwide in microlithography systems manufactured by ASML, Canon, GCA, Nikon, Karl Suss, Ultratech Stepper, and SVG. With extremely high stability, uniform output distribution and extended lamp lifetimes, the HSH Series has become the lamp choice of many of the world’s leading semiconductor manufacturers. PerkinElmer has been a leading manufac- turer of high intensity arc lamps for more than 30 years and is a premier lamp sup- plier for solid state lasers, medical equip- ment, NASA space systems and microlithography. PerkinElmer has steadily advanced lamp performance from 1000 watts to 8000 watts. With the intro- duction of new materials and proprietary manufacturing processes, we have extend- ed lamp lifetimes from several hundred hours to more than two thousand hours. The HSH Series provides longer lifetimes, outstanding uniformity, and excellent spectral quality which results in increased throughput, reduced downtime and an overall reduction in the cost of ownership. |
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