PHOTODIODE

Si photodiode

Highly reliable photodiode for VUV detection

S10043

S10043 is a Si photodiode designed to detect high-power ArF excimer lasers (193 nm) with high accuracy and stability. By combining our

newly developed technologies for forming ultra-thin PN junctions and high-reliability ultra-thin metal films, S10043 shows almost no change

Features

Applications

l Greatly improved sensitivity stability even after exposure

to ArF (

λ=193 nm) excimer laser

l ArF excimer laser detection

l Various UV detection

1

s Absolute maximum ratings (Ta=25 °C)

Parameter

Symbol

Value

Unit

Reverse voltage

5

V

Operating temperature *

2

Topr

-20 to +60

°C

Storage temperature *

2

Tstg

-55 to +80

°C

s Electrical and optical characteristics (Ta=25 °C)

Parameter

Symbol

Condition

Min.

Typ.

Max.

Unit

Spectral response range

λ

-

190 to 1000

-

nm

Peak sensitivity wavelength

λp

-

720

-

nm

Photo sensitivity

S

λ=193 nm

10

15

-

mA/W

Dark current

-

0.1

1

nA

Terminal capacitance

Ct

-

4

-

nF

Rise time

tr

Ω

10 to 90 %

-

9

-

µs

*1: S10043 uses a windowless package with no protection on the photodiode chip, and is shipped with the package held with

glass tape. Remove the glass tape when using.

*2: No condensation