DA7912_003.doc

May 05th, 2005

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00007912636

ECN 743

MS7912

PRESSURE SENSOR DIE (0-12 BAR)

• 0 to 1200 kPa range (12 bar or 174 PSI)

• Absolute/differential pressure sensors

• High linearity, small size

DESCRIPTION

The sensor element of the MS7912 consists of a small silicon micro-machined membrane with a Pyrex glass

mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure

sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential

sensor (MS7912D) has a hole in the Pyrex glass at the backside of the sensor.

FEATURES

•

Uncompensated pressure sensor die

•

Linearity 0.05% (typical)

•

Output Span 150mV @ 5V

•

Small Die Size 1.72 x 1.58mm

•

Temperature Range -40°…+125°C

•

Low Cost, High reliability

APPLICATION

•

For absolute or differential pressure sensor systems

•

Engine controls

•

Dive computers

ELECTRICAL CONNECTIONS

Positive output for pressure applied topside

bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers

(PBDE).

Vs+ : Supply voltage of Wheatstone bridge

Epi : Connection of epitaxial layer (membrane)

Out- : Negative output

Out+ : Positive output

GND1 : Ground

GND2 : Ground

Vs+

GND2

GND1

Out+

EPI

Out-