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AWM3000 Series
Mass flow sensor for gases
Notes:
3 A 5 micron filter is recommended for all devices.
4 Maximum allowable rate of flow change to prevent damage.
5 Temperature shifts in differential pressure devices are mostly due to the density change of the gas over temperature.
6 Shift is relative to 25 °C.
7 Initial warm-up time for signal conditioned circuitry is 1 minute max.
8 Output load connected from Vout to GND (current sinking).
9 Gas correction factors are referenced to nitrogen (N
2) as calibration gas type. Approximate gas correction factors are provided
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
10 When sensing Hydrogen (H
2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:
Hydrogen typ. 12 V, Helium typ. 15 V
11 Hydrogen (H
2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
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PERFORMANCE CHARACTERISTICS
CURRENT OUTPUT VERSIONS (V
S = 10 ±0.01 V, TA = 25°C)
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GAS CORRECTION FACTORS9