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B58600H8000A002 Datasheet(PDF) 6 Page - EPCOS |
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B58600H8000A002 Datasheet(HTML) 6 Page - EPCOS |
6 / 8 page Pressure sensors C32 series Absolute pressure sensor die Preliminary data AS SEN PD 2009-08-03 Please read Cautions and warnings and Page 6 of 8 Important notes at the end of this document. αs and βs are the linear and nonlinear temperature coefficient of the sensitivity respectively (see 15)). Therefore TCV0 + and TCV 0 – are defined for the measurement temperature range by: C 25 T ) C 25 ( V ) T ( V TCVo max o max o ° − ° − = + C 25 T ) C 25 ( V ) T ( V TCVo min o min o ° − ° − = − 12) Full scale value FS o max r out V ) p ( V FS − = 13) Sensitivity S The sensitivity is defined for a bridge voltage power supply VDD = 5 V. It can be determined by the formula: max r o max r out p V ) p ( V S − = This parameter is tested for process control on samples, mounted on a TO39 base. 14) Nonlinearity L This parameter may be influenced by assembly. The nonlinearity is measured using the endpoint method. Assuming a characteristic, this can be approximated by a polynomial of second order, where the maximum is at px = prmax/2. The nonlinearity is defined at px = prmax/2, using the equation: max r x o max r out o x out p p V ) p ( V V ) p ( V L − − − = This parameter is tested for process control on samples, mounted on a TO39 base. 15) Temperature coefficient of sensitivity α α α αS and β β β βS: These parameters may be influenced by assembly. The temperature coefficients of sensitivity are tested for design verification on samples, mounted on a TO39 base over a reduced temperature range Tmeas,min = –20 °C to Tmeas,max = 80 °C with TR = 25 °C. The temperature coefficients of first and second order are defined with the polynomial: ( ) ( ) ° − β + ° − α + ° = = 2 S S C 25 T C 25 T 1 ) C 25 T ( S ) T ( S The coefficients αS and βS are calculated using the three measurement points of S(T) at Tmeas,min, TR and Tmeas,max. 16) Pressure hysteresis pHys The pressure hysteresis is the difference between output voltages at constant pressure and constant temperature while applying a pressure cycle with pressure steps of pr, min, p1, p2, p3, pr,max, p3, p2, p1, pr, min: FS ) p ( V ) p ( V pHys k 1 , out k 2 , out − = With k = min, 1, 2, 3, max. The pressure steps are: prmin = 0, p1 = 0.25·pr,max, p2 = 0.5·pr,max, p3 = 0.75·pr, max, pr,max. This parameter is tested for design verification on samples, mounted on a TO39 base. 17) Reliability data For long-term stability of offset voltage LTSV0 please refer to the defined Aktiv Sensor’s standard AS100001 in chapter “Reliability data” on the internet. |
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