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B58600E0410A022 Datasheet(PDF) 2 Page - EPCOS |
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B58600E0410A022 Datasheet(HTML) 2 Page - EPCOS |
2 / 8 page Pressure sensors C29 series Absolute pressure sensor die for wet media AS SEN PD 2009-08-03 Please read Cautions and warnings and Page 2 of 8 Important notes at the end of this document. Applications Medical devices Automotive Automation Features Piezoresistive MEMS technology Small dimensions: 2.2 × 2.7 mm Square diaphragm Reference pressure chamber on topside Measured media (back side): Non-aggressive gases and fluids. Unsuitable for substances which react with glass or silicon. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 1.0 up to 10 bar Outstanding long-term stability Options Temperature sensing diode Delivery mode Tray Dimensional drawings X1 X9 X8 X5 X3 X2 X1 X8 X5 X9 X3 X2 ELECTRICAL DIAGRAM: p note 1: geometrie of diaphragm according costumer specification note 2: the quality of structured glass angles is influenced by machining technologies and is idealised plotted note 2 note 2 checked bond area (typ. 100µm x 100µm) all dimensions in µm p X1 : VDD+ X2 : Vout+ X3 : VDD– X5 : Vout– X8 : Diode (N) X9 : Diode (P) |
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