Pressure sensors

C41 series

Gauge pressure sensor die

AS SEN PD

2009-08-03

Please read

Cautions and warnings and

Page 6 of 8

Important notes at the end of this document.

o

max

r

out

V

)

p

(

V

FS

−

=

max

r

o

max

r

out

p

V

)

p

(

V

S

−

=

This parameter is tested for process control on samples, mounted on AK transducer package (AK2 series).

This parameter may be influenced by assembly.

The nonlinearity is measured using the endpoint method. Assuming a characteristic, this can be approximated

using the equation:

max

r

x

o

max

r

out

o

x

out

p

p

V

)

p

(

V

V

)

p

(

V

L

−

−

−

=

This parameter is tested for process control on samples, mounted on AK transducer package (AK2 series).

α

α

β

β

These parameters may be influenced by assembly.

The temperature coefficients of sensitivity are tested for design verification on samples, mounted on AK transducer

The temperature coefficients of first and second order are defined with the polynomial:

(

) (











°

−

β

+

°

−

α

+

°

=

=

2

S

S

C

25

T

C

25

T

1

)

C

25

T

(

S

)

T

(

S

The pressure hysteresis is the difference between output voltages at constant pressure and constant temperature while

FS

)

p

(

V

)

p

(

V

pHys

k

1

,

out

k

2

,

out

−

=

This parameter is tested for design verification on samples, mounted on AK transducer package (AK2 series).

F

The voltage drop is measured across anode and cathode by a forward current of 47 µA.

This parameter is tested completely on a wafer (wafer level test measurement).

F

The temperature sensitivity of diode voltage drop is defined by the measured values at –20 °C and 80 °C

using the equation:

min

,

meas

max

,

meas

min

,

meas

F

max

,

meas

F

F

T

T

)

T

(

V

)

T

(

V

TCV

−

−

=

The estimated temperature coefficient is also valid at temperatures between –40 °C and 135 °C.

This parameter is tested for design verification on samples, mounted on AK transducer package (AK2 series).

“Reliability data” on the internet.