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D6F-P Datasheet(PDF) 1 Page - Omron Electronics LLC

Part # D6F-P
Description  MEMS Mass Flow Sensor
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Manufacturer  OMRON [Omron Electronics LLC]
Direct Link  http://www.omron.com/index3.html
Logo OMRON - Omron Electronics LLC

D6F-P Datasheet(HTML) 1 Page - Omron Electronics LLC

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MEMS Mass Flow Sensor
D6F-P
7
MEMS Mass Flow Sensor
D6F-P
A Compact, High-performance Flow
Sensor with Dust Segregation Structure.
• Built in Dust Segregation System (DSS) with cyclone flow
structure, diverts particulates from sensor element.
• High resolution and repeatability, even at low flow rates.
• Barbed ports with connector or PCB terminals, or manifold
mount with connector versions.
• Built in voltage regulator, temperature compensation and
amplified output. Measure up to 200 LPM with a bypass setup.
• Alternative to differential pressure sensing.
• RoHS Compliant
Ordering Information
Note: 1. Can be calibrated for different gas types. Consult your Omron representative.
2. Dry gas must not contain large particles, eg dust, oil, mist.
3. Cable Assembly “D6F-CABLE2”, used with D6F-P0010A2 and D6F-P0010AM2, is sold separately.
Specifications
■ Characteristics
Note: 1. Mass flow converted into volumetric flow rate, SLM (standard liters per minute) at 0
°C, 1 atmosphere.
2. Dry gas. (must not contain large particles, dust, oil, mist)
Description
Case
Calibration Gas
(See note 1.)
Flow Range
Mounting
Method
Connection
Model
Flow Sensor
PBT
Air (See note 2.)
0-0.1 LPM
Flange mount
PCB terminals
D6F-P0001A1
0-1 LPM
D6F-P0010A1
Connector
D6F-P0010A2
Manifold mount
Connector
D6F-P0010AM2
Cable Connector Assembly
- - -
- - -
- - -
- - -
- - -
D6F-CABLE2
Models
D6F-P0001A1
D6F-P0010A1
D6F-P0010A2
D6F-P0010AM2
Flow Range (See note 1.)
0 to 0.1 L/min.
0 to 1 L/min.
Calibration Gas (See note 2.)
Air
Flow Port Type
barbed fitting maximum outside dia. 4.9 mm
manifold mount
Electrical Connection
Lead terminal
Connector (3 wire)
Power Supply
4.75 to 9.45 VDC
Current Consumption
Max. 15 mA (no load, Vcc = 5 VDC)
Operating Output Voltage
0.5 to 2.5 VDC
Output Voltage Limits (Min and Max.)
0 VDC min. and 3.1 VDC max. (Lead resistance 10 k
Ω)
Accuracy and Temperature Characteristics
± 5% F.S. max. of detected characteristics at 25 °C, within -10 to 60 °C (typical test results within ±2% F.S.)
Repeatability (Reference (typical))
± 1.0% F.S.
± 0.4% F.S.
Case Material
PBT
Degree of Protection
IP40
Withstand Pressure
50 kPa (7 psi)
Pressure Drop (Reference (typical))
0.19 kPa
0.48 kPa
Operating Temperature
-10 to 60
°C (1 LPM versions) and -33 to 75°C (0.1 LPM version) with no icing or condensation
(Storage: -40 to 80
°C with no icing or condensation)
Operating Humidity
35 to 85% RH with no icing or condensation (Storage: 35 to 85% RH with no icing or condensation)
Insulation Resistance
20 M
Ω (500 VDC between lead terminal and the case)
Dielectric Strength
500 VAC, 50/60 Hz for 1 minute. (Leakage current typ. Max. 1mA) between lead terminals and case.
Weight
8.5 g
8.0 g
Response Time (Reference (typical))
150 msec


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