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S9682 Datasheet(PDF) 2 Page - Hamamatsu Corporation

Part # S9682
Description  Si photodiode Highly reliable photodiode for VUV detection
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Manufacturer  HAMAMATSU [Hamamatsu Corporation]
Direct Link  http://www.hamamatsu.com
Logo HAMAMATSU - Hamamatsu Corporation

S9682 Datasheet(HTML) 2 Page - Hamamatsu Corporation

  S9682_11 Datasheet HTML 1Page - Hamamatsu Corporation S9682_11 Datasheet HTML 2Page - Hamamatsu Corporation S9682_11 Datasheet HTML 3Page - Hamamatsu Corporation  
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Si photodiode
S9682, S9683
2
s Variation in sensitivity due to VUV exposure
KSPDA0165EC
s Dimensional outlines (unit: mm)
S9682
S9683
KSPDA0166EA
CONVENTIONAL TYPE
S9682, S9683
NUMBER OF SHOT
[Typ. ArF excimer laser, 0.1 mJ/cm
2/pulse, f=100 Hz,
λ=193 nm, pulse width=15 ns (FWHM)]
5 × 10
6
1 × 10
6
0
1 × 10
7
40
20
60
80
100
120
KSPDB0254EA
Y
13.9 ± 0.2
12.35 ± 0.1
9.1 ± 0.1
X
0.085
ACTIVE AREA
5.8 × 5.8
PHOTOSENSITIVE
SURFACE
QUARTZ WINDOW
0.45
LEAD
7.5 ± 0.2
Center of active area relative
to center of cap
-0.485
≤X≤+0.315
-0.4
≤Y≤+0.4
ANODE TERMINAL MARK
1.4
COMMON TO CASE
42.0 ± 0.3
34.0 ± 0.2
WINDOW
16.0 ± 0.2
(2 ×)
4
QUARTZ WINDOW (t=1.0)
PHOTOSENSITIVE
SURFACE
( 24.5)
COMMON TO CASE
ACTIVE AREA
10 × 10


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