395, rue Louis Lépine - BP7 - 34935 Montpellier - Cedex 9 - France - sales@qualiflow.com - tel# (0)4 67 99 47 47 fax# (0)4 67 99 47 48

Mass flow controllers &

accessories

MFCs & MFMs series

AFC 50 / AFM 55

The traditional analog Qualiflow Therm AFC 50 and AFM 55 with elastomeric seals and magnetic

valve :

- Unique fast and reliable horizontal magnetic valve

- Low pressure drop option for TEOS SDC, TiCl4, etc… Using Large sensor diameter gives very low

pressure drop and defeats contamination and clogging

- Perfect flow splitting through special bypass design, giving optimal linearity and accuracy

AFC 50D / AFM 55D

The highest performances of digital P.C.B. combined with elastomeric seals on the Qualiflow

Therm AFC 50 D and AFM 55 D :

- Full potential of digital technology

- Low pressure drop option for TEOS SDC, TiCl4, etc..

- 100% compatible with analog AFC50

AFC 202 / AFM 302

For high flow from 30 slm to 250 slm, the traditional analog Qualiflow Therm AFC 202 and AFM

302 with elastomeric seals and magnetic valve :

- Unique fast and reliable horizontal magnetic valve

- Special pressure compensated stainless steel valve for ultra fast flow control

- No particle generation or entrapment

AFC 202D / AFM 302D

For high flow from 30 slm up to 250 slm, the highest performances of digital P.C.B. combined with

elastomeric seals on the Qualiflow Therm AFC 202D and AFM 302D :

- Full potential of digital technology

- Special pressure compensated stainless steel valve for ultra fast flow control

AFC 260 - 261 / AFM 360 - 361

The traditional analog Qualiflow Therm AFC 260 & 261 and AFM 360 & 361 with elastomeric

seals and reliable thermal valve :

-�� Compatible with other MFC

-� Economic design, simple construction

-� Possibility to regulate with external readout

AFM 10 & 11

A small flow meter designed to replace rotameter whenever an electrical signal of the flow

measurement is required :

- Low cost design, simple construction

- Small footprint

- Accuracy up to ±2% F.S.

Smart solutions to meet your needs

DeviceNet

-

Analog

-

Digital

-

ModBus

communication

MFC

Calibration

&

Retrofit

support

center

Gas systems solutions & manufacturing - Gas accessories

Special

MFC

configuration

upon

request

(metal

design...)

10sccm

-

25slm

10sccm

-

25slm

30sccm

-

250slm

30slm

-

250slm

10sccm

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5slm

10slm

-

20slm

2slm

-

60slm

100slm

-

200slm