4

D6F-P

MEMS Flow Sensor

Safety Precautions

The D6F is built for use with general-purpose devices. In cases

such as those described below, where safety is required, imple-

ment measures to ensure the safety of the system and all

devices, such as fail-safe designs, redundancy designs, and reg-

ular maintenance.

• Safety devices for ensuring safety for persons

• Transportation equipment control (such as applications to stop

operation)

• Aviation and space equipment

• Nuclear power equipment

Do not use the D6F for applications in which D6F operation

would directly affect human life.

Make sure that the power to all equipment is turned OFF before

you install the Sensor. Installing the Sensor while the power sup-

ply is ON may result in electrical shock or abnormal operation.

● Fluids,Tubes, and Sensor Installation

All Models

(1) Use clean fluids. Dust and mist can affect the characteristics

of the Sensor or damage the Sensor. Install a filter and mist

separator on the upstream tube.

(Not required for the D6F-W@A1 or D6F-P.)

(2) Do not use combustible gases (e.g., hydrogen), corrosive

gases (e.g., chlorine, sulfur, acidic, or alkali gas), or other

non-approved fluids. They may damage the Sensor.

(3) The performance specifications that are given for the G6F

do not apply if any fluids other than the specified applicable

fluid are used.

(4) Foreign matter in the tubes that are connected to the Sensor

may damage the Sensor. Prevent any foreign matter from

entering the tubes after the Sensor is removed from its

packaging.

(5) Attach the tubes so that fluid flows only in the direction des-

ignated by the arrows on the Sensor. Correct measure-

ments cannot be obtained if the fluid flows in the wrong

direction.

(6) We recommend that you install the tubes horizontally. If the

tubes are not installed horizontally, an error of

±1% FS or

higher may result.

(This does not apply to the D6F-03A3.)

(7) Install the Sensor on a flat surface. Incorrect installation may

damage the Sensor and make it impossible to obtain correct

measurements.

(8) After the Sensor is installed, check to confirm that it oper-

ates correctly.

(9) Do not drop the Sensor, remove the cover, or attempt to dis-

assemble the Sensor in any way.

D6F-P0001A1, D6F-P0010A1, and D6F-P0010A2

(1) Depending on the ambient environment and installation

location, dust, dirt, and other foreign matter may come in

inside the Sensor and block a part or all of the flow path or

accumulate on internal components. This may result in the

Sensor not being able to perform to the specifications given

above. Always perform a pre-evaluation on your actual

equipment and be aware of the possible problems that may

occur before you use the Sensor with the actual equipment.

(2) Attach all tubes so that the fluid flows only in the direction

from the positive side (

+) to the negative side (−).

(3) For PCB-mounting, perform terminal soldering only after the

Sensor is secured into place on the PCB.

(4) Use M2.6 panhead screws or equivalent tapping screws to

mount the Sensor, and tighten the screws to a maximum

torque of 0.59 N·m.

D6F-P0010AM2

(1) Depending on the ambient environment and installation

location, dust, dirt, and other foreign matter may come in

inside the Sensor and block a part or all of the flow path or

accumulate on internal components. This may result in the

Sensor not being able to perform to the specifications given

above. Always perform a pre-evaluation on your actual

equipment and be aware of the possible problems that may

occur before you use the Sensor with the actual equipment.

(2) Attach all tubes so that the fluid flows only in the direction

from the positive side (

+) to the negative side (−).

(3) Use M3 panhead screws or equivalent tapping screws to

mount the Sensor, and tighten the screws to a maximum

torque of 0.59 N·m.

(4) Install O-rings to seal the fluid inlet and outlet points. The

recommended O-ring is JIS B 2401, nominal number P4.

● Operating Environment

Do not use the Sensor in the following locations:

• Locations directly subject to heat radiated from heating equip-

ment

• Locations subject to water or oil

• Locations subject to direct sunlight

• Locations subject to intense temperature changes

• Locations subject to icing or condensation

• Locations subject to excessive vibration or shock

● Countermeasures against Noise

Noise may make it impossible to obtain correct measurements.

Consider the following countermeasures.

• Allow as much space as possible between the Sensor and

devices that generates high frequencies (such as high-frequency

welders and high-frequency sewing machines) or surges.

• Attach surge absorbers or noise filters to noise-generating

devices that are near the Sensor (in particular, equipment with

inductance, such as motors, transformers, solenoids, and

magnetic coils).

(It also helps to separate pipes and ducts, and to use shielded

cables.)

● Power Supply

• Do not directly solder power supply leads to the connector ter-

minals. Use only the appropriate connectors.

• Wire with the correct terminal names and polarities. Incorrect

wiring will cause failure of internal components.

• When using a commercially available switching regulator,

ground the FG (frame ground) and G (ground) terminals.

WARNING

Caution

Precautions for Correct Use

O-ring

M3 panhead screw or a tapping screw

with the same diameter

Installation Example