R

2

Silicon Wafer Mapping Sensor

F3M-S

Allows Simultaneous Mapping of up

to 25 Silicon Wafers

H

Economical, one sensor detects most

wafer types, including dummy wafers

H

Models match wafer sizes of 300 mm,

200 mm and 150 mm

H

Automatic and remote teaching

capability

H

Self-diagnostic functions reduce

downtime

Ordering Information

Applicable wafer size

Number of cassette slots

Function

Remarks

Part number

6 inches (4.76-mm pitch)

25

Self-diagnosis

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F3M-S625

6 inches (4.76 mm pitch)

26

---

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F3M-S626

8 inches (6.35-mm pitch)

25

Self-diagnosis

---

F3M-S825

8 inches (6.35 mm pitch)

26

---

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F3M-S826

12 inches (10-mm pitch)

13

Self-diagnosis

CE marking

F3M-S1213

12 inches (10 mm pitch)

25

Self-diagnosis

CE marking

F3M-S1225

Application Examples

Detects Transparent Glass Wafers

with a Transparency of 92%

(F3M-S6j and F3M-S8j)

The F3M-S allows the mapping of cassettes that have both

silicon wafers and glass wafers. The F3M-S also accurately

detects dummy wafers in the carrier used to test coating or

processing tolerances.

Automatic Teaching Saves Setting Time

Remote Teaching Available

The F3M-S has an automatic teaching function that ensures easy

adjustments within a minimal time. The remote teaching function

allows quick, on-the-fly set up.

Answer-back Alarms for Setting Errors and

Self-diagnostic Alarms for Operation Errors

These alarms help reduce system downtime and shorten

troubleshooting time.

Note: The self-diagnostic output function is not incorporated by

the F3M-S826/-S626.

Static Electricity Protection

OMRON’s optical system, including an emitter and receiver,

prevents Sensor malfunction and damage by protecting the

Sensor from static electricity that may be charged on

semiconductor wafers at the time of mapping.