4

Power consumption

Voltage source mode

Voltage range

Power

0.5 V

20 x Ic (W)

2 V

20 x Ic (W)

5 V

20 x Ic (W)

20 V

20 x Ic (W)

40 V

40 x Ic (W)

100 V

100 x Ic (W)

Where Ic is the current compliance setting.

Current source mode

Voltage compliance Power

Vc ≤ 20

20 x Io (W)

20 < Vc ≤ 40

40 x Io (W)

40 < Vc ≤ 100

100 x Io (W)

Where Vc is the voltage compliance setting

and Io is output current.

Voltage range, resolution, and accuracy (high speed ADC)

Voltage range

Force resolution

Measure resolution

Force accuracy¹

Measure accuracy¹

Maximum current

±0.5 V

25 µV

0.5 µV

±(0.018 % + 150 µV)

±(0.01 % + 250 µV)

100 mA

±2 V

100 µV

2 µV

±(0.018 % + 400 µV)

±(0.01 % + 700 µV)

100 mA

±5 V

250 µV

5 µV

±(0.018 % + 750 µV)

±(0.01 % + 2 mV)

100 mA

±20 V

1 mV

20 µV

±(0.018 % + 3 mV)

±(0.01 % + 4 mV)

100 mA

±40 V

2 mV

40 µV

±(0.018 % + 6 mV)

±(0.015 % + 8 mV)

²

±100 V

5 mV

100 µV

±(0.018 % + 15 mV)

±(0.02 % + 20 mV)

²

1. ± (% of read value + offset voltage V)

2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts.

Current range, resolution, and accuracy (high speed ADC)

SMU type

Current

range

Force

resolution

Measure

Force accuracy³

Measure accuracy³

Maximum

voltage

HRSMU w/ ASU

±1 pA

1 fA

100 aA

±(0.9 %+15 fA)

±(1.8 %+12 fA)

100 V

HRSMU

±10 pA

5 fA

400 aA (with ASU)

1 fA (HRSMU)

±(0.46 %+30 fA+10 aA x Vo)

±(0.5 %+15 fA+10 aA x Vo)

100 V

±100 pA

5 fA

500 aA (with ASU)

2 fA (HRSMU)

±(0.3 %+100 fA+100 aA x Vo) ±(0.5 %+40 fA+100 aA x Vo)

100 V

MPSMU

±1 nA

50 fA

10 fA

±(0.1 %+300 fA+1 fA x Vo)

±(0.25 %+300 fA+1 fA x Vo)

100 V

±10 nA

500 fA

10 fA

±(0.1 %+3 pA+10 fA x Vo)

±(0.25 %+2 pA+10 fA x Vo)

100 V

±100 nA

5 pA

100 fA

±(0.05 %+30 pA+100 fA x Vo) ±(0.1 %+20 pA+100 fA x Vo)

100 V

±1 µA

50 pA

1 pA

±(0.05 %+300 pA+1 pA x Vo)

±(0.1 %+200 pA+1 pA x Vo)

100 V

±10 µA

500 pA

10 pA

±(0.05 %+3 nA+10 pA x Vo)

±(0.05 %+2 nA+10 pA x Vo)

100 V

±100 µA

5 nA

100 pA

±(0.035 %+15 nA+100 pA x Vo) ±(0.05 %+20 nA+100 pA x Vo)

100 V

±1 mA

50 nA

1 nA

±(0.04 %+150 nA+1 nA x Vo)

±(0.04 %+200 nA+1 nA x Vo)

100 V

±10 mA

500 nA

10 nA

±(0.04 %+1.5 µA+10 nA x Vo) ±(0.04 %+2 µA+10 nA x Vo)

100 V

±100 mA

5 µA

100 nA

±(0.045 %+15 µA+100 nA x Vo) ±(0.1 %+20 µA+100 nA x Vo)

4

1. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.

2. Measurements made in the lower ranges can be greatly impacted by vibrations and shocks. These specifications assume an environment free of

these factors.

3. ± (% of read value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo))

4. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps.

100

50

20

-20

-50

-100

-100

-40

-20

20

40

100

Current (mA)

Voltage (V)

MPSMU and HRSMU measurement and output range