N1300A-001 datasheet(10/23 Pages) HP

Part #	N1300A-001

Description	Agilent B1500A Semiconductor Device Analyzer

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Manufacturer	HP [Agilent(Hewlett-Packard)]

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9

Parameters E

POSC ZOSC

Oscillator level

E

POSC (%)

Z

OSC (mΩ)

125 mV < V

OSC ≤ 250 mV

0.03 x (250/ V

OSC - 1)

5 x (250/ V

OSC - 1)

64 mV < V

OSC ≤ 125 mV

0.03 x (125/ V

OSC - 1)

5 x (125/ V

OSC - 1)

32 mV < V

OSC ≤ 64 mV

0.03 x (64/ V

OSC - 1)

5 x (64/ V

OSC - 1)

V

OSC ≤ 32 mV

0.03 x (32/ V

OSC - 1)

5 x (64/ V

OSC - 1)

V

OSC is oscillator level in mV.

Parameters E

PL YOL ZSL

Cable length

E

PL (%)

Y

OL (nS)

Z

SL (mΩ)

1.5 m

0.02 + 3 x f/100

750 x f/100

5.0

3 m

0.02 + 5 x f/100

1500 x f/100

5.0

f is frequency in MHz. If measurement cable is extended, open compensation,

short compensation, and load compensation must be performed.

Parameters Y

OSC YO EP ZS

Frequency

Y

OSC (nS)

Y

O (nS)

E

P (%)

Z

S (mΩ)

1 kHz ≤ f ≤ 200 kHz

1 x (125/ V

OSC – 0.5)

1.5

0.095

5.0

200 kHz < f ≤ 1 MHz

2 x (125/ V

OSC – 0.5)

3.0

0.095

5.0

1 MHz < f ≤ 2 MHz

2 x (125/ V

OSC – 0.5)

3.0

0.28

5.0

2 MHz < f

20 x (125/ V

OSC – 0.5)

30.0

0.28

5.0

f is frequency in Hz.

V

OSC is oscillator level in mV.

Example of calculated C/G measurement accuracy

Frequency

Measured

capacitance

C accuracy¹

Measured

conductance

G accuracy¹

5 MHz

1 pF

±0.61 %

≤ 3 µS

±192 nS

10 pF

±0.32 %

≤ 31 µS

±990 nS

100 pF

±0.29 %

≤ 314 µS

±9 µS

1 nF

±0.32 %

≤ 3 mS

±99 µS

1 MHz

1 pF

±0.26 %

≤ 628 nS

±16 nS

10 pF

±0.11 %

≤ 6 µS

±71 nS

100 pF

±0.10 %

≤ 63 µS

±624 nS

1 nF

±0.10 %

≤ 628 µS

±7 µS

100 kHz

10 pF

±0.18 %

≤ 628 nS

±11 nS

100 pF

±0.11 %

≤ 6 µS

±66 nS

1 nF

±0.10 %

≤ 63 µS

±619 nS

10 nF

±0.10 %

≤ 628 µS

±7 µS

10 kHz

100 pF

±0.18 %

≤ 628 nS

±11 nS

1 nF

±0.11 %

≤ 6 µS

±66 nS

10 nF

±0.10 %

≤ 63 µS

±619 nS

100 nF

±0.10 %

≤ 628 µS

±7 µS

1 kHz

100 pF

±0.92 %

≤ 63 nS

±6 nS

1 nF

±0.18 %

≤ 628 nS

±11 nS

10 nF

±0.11 %

≤ 6 µS

±66 nS

100 nF

±0.10 %

≤ 63 µS

±619 nS

1. The capacitance and conductance measurement accuracy is speciﬁed under

the following conditions:

D

X = 0.1

Integration time: 1 PLC

Test signal level: 30 mVrms

At four-terminal pair port of MFCMU

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