06 | Keysight | Precision Current-Voltage Analyzer Series - Technical Overview

The Most Accurate and Unparalleled Measurement

Range on the Market, from 0.1 fA to 1500 A/10 kV

A broad dynamic range is covered by the auto-ranging

and sweep capabilities

The IV characteristic can curve across multiple levels in most cases. Because

the SMU in IV analyzer supports the built-in sweep operation in either DC step or

pulsed step, it is extremely useful in performing IV measurements and drawing

the IV curve in a single operation. In addition, SMU supports the auto-ranging

capability that can change the measurement ranges automatically according to

the measured value. These capabilities allow you to quickly obtain the full lV

curve with the best accuracy.

Wide range to cover from 0.1 fA ultra low current to high

voltage/current up to 1500 A/10 kV

The SMU’s close integration of source and measurement circuitry reduces cable

connections, and lowers measurement errors such as noise. The SMU’s intrinsic

low noise level, active guard technology and triaxial connection enable low current

measurement down to 0.1 fA. In conjunction with the sweep and auto-ranging

capabilities, the IV analyzer enable accurate IV characterization for a wide dynamic

range from sub-ρA to A level across multiple levels.

The precision IV analyzer series offers a wide selection of SMU differentiated by

the output coverage, low current performance and price range for low to mid

power range. In addition, the advanced device analzyer offers more speciic

measurement capabilities and a greater output range for high power applications.

The wide line-up allows to choose the best IV characterizatin solution to meet

your needs from the application, performance, and cost view points.

Voltage

Range

Fixed range (1µA)

Auto range

Sweep capability with auto-ranging

enables accurate measurement

in the wide band.

Auto-ranging in sweep measurement

1pA

1nA

1mA

1µA

On wafer MOS FET measurement example by different SMUs

Economic IV Analyzer

MPSMU of Precision IV and Advanced Analyzer

SMU with ASU of Precision IV and Advanced Analyzer

HRSMU of Precision IV and Advanced Analyzer

(*) Measurement results after the

zero offset cancel function for

the Precision IV and Advanced

Analyzers, and offset subtraction

by user for Economic IV Analyzer.