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SFM5400 Datasheet(PDF) 6 Page - List of Unclassifed Manufacturers

Part # SFM5400
Description  Ultra-fast settling time (down to 50 ms)
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Manufacturer  ETC2 [List of Unclassifed Manufacturers]
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CMOSensSFC5400 / SFM5400 Mass Flow Controller / Meter for Gases
www.sensirion.com
October 2016 – V12
6/12
3 Electrical and communication specifications
3.1
Connector and pin layout (digital,
analog + Aux RS485, analog)
SFC5400 / SFM5400 feature the following analog and
digital communication interfaces:
Analog: 0-5 V, 0-10 VDC, 4-20 mA
Digital: RS485, DeviceNet, IO-Link
Detailed specification of the digital communication
protocols can be found on the Sensirion website.
The electrical connector of the SFC5400 / SFM5400
is a standard HD Sub-D 9pin. This enables an easy
and reliable universal connection. See the pin layouts
for different interface versions below:
Figure 8: Digital interface version (RS485, DeviceNet and
IO-Link). This version has the order code “L” (see Sec. 6).
Figure 9: Standard analog only interface versions (0-5VDC,
0-10VDC, 4-20mA). These versions have order codes “U”,
“W”, and “C” respectively (see Sec. 6).
*GND pins are interconnected on the PCB of the device.
Figure 10: Analog interface versions (0-5VDC, 0-10VDC, 4-
20mA) with auxiliary RS485 interface for extended
functionality. RS485 interface is for service purposes only,
e.g. it is not possible to set the set point using RS485.
These versions have order codes “Q”, “R”, and “S”
respectively (see Sec.0). Note that the pin layout of this
version is not compatible to our analog only devices shown
in Figure 9.
*GND pins are interconnected on the PCB of the device.
3.2
Power supply
The SFC5400 / SFM5400 mass flow controller / meter
requires a standard voltage supply of +14.0 to + 26.0
VDC. There are no stringent requirements for voltage
ripple and stability because of the internal voltage
regulation.
3.3
Installation instructions for voltage or
current controlled devices
It is important to use completely independent signal
ground lines for each device. Interconnection of signal
ground lines between each other or with supply
ground will lead to wrong operation of MFC / MFM
devices. Ground pins for signal and supply circuits
are interconnected on the PCB of the device.
3.4
Valve override inputs (analog versions)
The valve of the SFC5400 mass flow controller is a
“normally closed” type. For security reasons the
SFC5400 mass flow controller is equipped with two
valve override functions:
Purge Mode: Setting 5VDC to pin 9 fully opens the
control valve ignoring any set point.
Shut Mode: Setting 5VDC to pin 1 fully closes the
control valve ignoring any set point.


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