MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

Order Number: MPXAZ6115A

Rev. 1, 06/2004

© Motorola, Inc. 2004

Media Resistant and

High Temperature Accuracy

Integrated Silicon Pressure Sensor

for Measuring Absolute Pressure,

On-Chip Signal Conditioned,

Temperature Compensated

and Calibrated

Motorola's MPXAZ6115A series sensor integrates on-chip, bipolar op amp

circuitry and thin film resistor networks to provide a high output signal and

temperature compensation. The sensor's packaging has been designed to provide

resistance to high humidity conditions as well as common automotive media. The

small form factor and high reliability of on-chip integration make the Motorola

pressure sensor a logical and economical choice for the system designer.

The MPXAZ6115A series piezoresistive transducer is a state-of-the-art,

monolithic, signal conditioned, silicon pressure sensor. This sensor combines

advanced micromachining techniques, thin film metallization, and bipolar

semiconductor processing to provide an accurate, high level analog output signal

that is proportional to applied pressure.

Figure 1 shows a block diagram of the internal circuitry integrated on a pressure

sensor chip.

Features

•

Resistant to High Humidity and Common Automotive Media

•

Improved Accuracy at High Temperature

•

1.5% Maximum Error over 0

° to 85°C

•

Ideally suited for Microprocessor or Microcontroller-Based Systems

•

Temperature Compensated from -40

° to +125°C

•

Durable Thermoplastic (PPS) Surface Mount Package

Application Examples

•

Aviation Altimeters

•

Industrial Controls

•

Engine Control/Manifold Absolute Pressure (MAP)

•

Weather Station and Weather Reporting Devices

Figure 1. Fully Integrated Pressure Sensor

Schematic

MPXAZ6115A

MPXHZ6115A

SERIES

MPXAZ6115A6U

CASE 482-01

INTEGRATED

PRESSURE SENSOR

15 to 115 kPa (2.2 to 16.7 psi)

0.2 to 4.8 Volts Output

SMALL OUTLINE PACKAGE

MPXAZ6115AC6U

CASE 482A-01

MPXHZ6115A6U

CASE 1317-04

SUPER SMALL OUTLINE PACKAGE

MPXAZ6115AC6U

CASE 1317A-03

5

6

7

8

N/C

Gnd

N/C

N/C

N/C

PIN NUMBER

1

2

3

4N/C

device connections. Do not

connect to external circuitry or

ground. Pin 1 is denoted by the

notch in the lead.

VS

SENSING

ELEMENT

Vout

GND

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #1

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

PINS 1, 5, 6, 7 AND 8 ARE NO CONNECTS

Freescale Semiconductor, Inc.

For More Information On This Product,

Go to: www.freescale.com