SILICON
MICROSTRUCTURES
I NCO R P O R AT ED
2001-2002
Silicon Microstructures, Inc.
♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: 408-577-0100
♦ Fax: 408-577-0123 ♦ Sales@Si-Micro.Com ♦ WWW.Si-Micro.Com
SM5106
Low Cost OEM Pressure Die
• Small, Low Cost OEM Pressure Die
DESCRIPTION
The SM5106 is a very small (1.56mm x
1.56mm) silicon micromachined
piezoresistive pressure sensing chip that
has been optimized to provide the highest
possible accuracy for a die of this size.
This performance is achieved through
careful resistor placement and mechanical
configuration. The small die results In a
significant cost saving when compared to
larger sensor die.
This sensor is intended for high volume
applications where cost is a critical factor,
such as consumer tire pressure gauges or
disposable pressure monitors. The SM5106
is available as an absolute pressure sensor
in full-scale ranges of 15 PSI, 30 PSI, 60
PSI, and 150 PSI. It is designed to be
mounted on ceramic or PC board substrates
by OEM manufacturers.
Die are probed, inked, diced, and visually
inspected and shipped on tape in rings.
Custom pressure ranges available in high-
volume applications.
FEATURES
•
Available in 15 PSI, 30 PSI, 60 PSI, and
150 PSI ranges
•
Very Low Cost
•
Small size (1.56 mm square)
•
Constant Current or Constant Voltage
Drive
•
High Millivolt Output
APPLICATIONS
•
Automotive Tire
•
Engine Control
•
Blood Pressure
•
Pneumatic Gages
•
Hand-held Meters
•
Home Appliances
Rev 1.2 8_02
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