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16493R-803 Datasheet(PDF) 3 Page - Agilent(Hewlett-Packard)

Part # 16493R-803
Description  Agilent B1500A Semiconductor Device Analyzer
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Manufacturer  HP [Agilent(Hewlett-Packard)]
Direct Link  http://www.home.agilent.com
Logo HP - Agilent(Hewlett-Packard)

16493R-803 Datasheet(HTML) 3 Page - Agilent(Hewlett-Packard)

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Basic Features
• PC-based instrument with touch screen
interface; optional USB keyboard and
mouse available
• EasyEXPERT software with over 200
categorized application tests supplied
with the instrument
• Performs current versus voltage (IV)
measurements
• Performs capacitance versus voltage
(CV), capacitance versus time (Ct)
and capacitance versus frequency (Cf)
measurements
• Performs quasi-static CV (QSCV)
measurements
• High voltage pulse forcing up to 40 V
with ALWG and voltage monitor
capabilities.
• Performs fast IV measurement synchro-
nized with the applied waveforms for
accurate transient IV or time-domain
measurements
• Front-panel Classic Test measurement
modes supported: single-channel sweep,
multi-channel sweep, time sampling,
list sweep, CV sweep and direct control
(GPIB FLEX)
• GUI-based control of the Agilent
B2200A, and B2201A switching matrices
• Modular mainframe with ten module
slots and one 4.2 A ground unit
• Multiple source/monitor unit (SMU)
types available: medium power
(MPSMU), high-power (HPSMU), and
high-resolution (HRSMU)
• Multi-frequency capacitance measure-
ment unit (MFCMU) available
• High-voltage semiconductor pulse
generator unit (HV-SPGU) available
• Waveform generator/fast measurement
unit (WGFMU) available
• High-resolution, analog-to-digital
converter (ADC) available to all installed
SMUs
• High-speed ADC present on each
installed SMU
• SMU/AUX path switching supported on
the atto-sense and switch unit (ASU)
• SMU/MFCMU switching supported
using SMU CMU unify unit (SCUU) and
guard switch unit (GSWU)
• MFCMU automatically identifies
capacitance measurement accessories
• WGFMU/SMU path switching supported
on the remote-sense and switch unit
(RSU)
• GPIB port for instrument control
• Self-test, self-calibration, diagnostics
Specification conditions
This document lists specifications and
supplemental information for the B1500A
and its associated modules. The specifica-
tions are the standards against which the
B1500A and its associated modules are
tested. When the B1500A and any of its
associated modules are shipped from the
factory, they meet the specifications. The
“supplemental” information and “typical”
entries in the following specifications are
not warranted, but provide useful informa-
tion about the functions and performance
of the instrument.
B1500A specification
Supported plug-in modules
The B1500A supports ten slots for plug-in modules.
Part
number
Description
Slots
occupied
Range of operation
Measure
resolution
B1510A
High power source/monitor unit (HPSMU)
2
-200 V to 200 V, -1 A to 1 A
2 µV, 10 fA
B1511A
Medium power source/monitor unit (MPSMU)
1
-100 V to 100 V, -100 mA to 100 mA
0.5 µV, 10 fA
B1517A
High resolution source/monitor unit (HRSMU)
1
-100 V to 100 V, -100 mA to 100 mA
0.5 µV, 1 fA
E5288A¹ Atto-sense and switch unit (ASU)
-100 V to 100 V, -100 mA to 100 mA
0.5 µV, 100 aA
B1520A
Multi frequency capacitance measurement unit (MFCMU)
1
1 kHz to 5 MHz
0.035 fFrms²
B1525A
High voltage semiconductor pulse generator unit (HV-SPGU)
1
±40 V (80 Vp-p)
50 μV
B1530A
Waveform generator/fast measurement unit (WGFMU)
1
PG Mode: -3 V to 3 V, -5 V to 5 V
Fast IV Mode: -3 V to 3 V, -5 V to
5 V, 0 V to 10 V, -10 V to 0 V
0.014 % of the
range 3
1. This is connected with the B1517A high resolution SMU.
2. Dispersion of measurement values when connecting a DUT 10 pF to the measurement terminals under the measurement condition of frequency
1 MHz, signal level 250 mVac, and measurement time 1 PLC. The display resolution is 0.000001 fF at 1 fF order by 6 digits display.
3. Display resolution
The measurement and output accuracy
are specified at the rear panel connector
terminals when referenced to the Zero
Check terminal. The B1530A WGFMU
measurement and output accuracy are
specified at the output terminal of the RSU.
Accuracy is specified under the following
conditions:
1. Temperature: 23 °C ±5 °C
2. Humidity: 20 % to 60 %
3. After 40 minute warm-up followed by
self-calibration
4. Ambient temperature change less than
±1 °C after self-calibration execution,
not applicable for MFCMU and WGFMU
5. Measurement made within one hour
after self-calibration execution, not
applicable for MFCMU and WGFMU
6. Calibration period: 1 year
7. SMU integration time setting:
1 PLC (1 nA to 1A range, voltage range)
20 PLC (100 pA range)
50 PLC (1 pA to 10 pA range)
Averaging of high-speed ADC:
128 samples per 1 PLC
8. SMU filter: ON (for SMUs)
9. SMU measurement terminal connection:
Kelvin connection
10. WGFMU load capacitance: 25 pF or less
Note: Agilent Technologies is responsible
for removing, installing, and replacing the
B1500A modules. Contact your nearest
Agilent Technologies to install and
calibrate the B1500A modules


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