www.sensirion.com

October 2016 – V12

3/12

Specification

Value

Unit

Full scale flow

0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10

whichever is greater

0.8

1

0.08

0.1

% FS

0.1

0.2

% s.p.

0.01

0.02

% FS

ms

Measurement frequency

1000

Hz

Better than 1'000:1

Standard calibration gases

+ other gases and mixtures on request

(not compatible with aggressive gases, see wetted material list or contact Sensirion)

Operating temperature (ambient and gas)

0 – 50 / 32 – 122

°C / °F

Temp. coeff. zero

0.005

% FS / °C

Temp. coeff. span

0.06

% s.p. / °C

Pressure drop at full flow

SFC5400

SFM5400

< 2.0 / 29

< 0.1 / 1.5

< 3.0 / 43

< 0.2 / 3

bar / psig

10 / 145

bar / psig

5 / 73

4 / 58

bar / psig

Leak integrity MFC external

mbar l/s He

Leak integrity through closed valve

mbar l/s He

1

sec

1

Reduced performance

2

Including offset, non-linearity and hysteresis. Measured against NIST traceable reference

3

in % of set point (s.p.) = measured value (m.v.) = rate = reading

4

Step answer from 10% to 100% of full scale within

5% of set point. MFCs with analog interfaces have longer settling time due

to the analog circuitry delays (typically by factor 2).

5

Minimal order quantity of 50 units per year

6

Specification is valid for mass flow controller only. Performance of devices with analog interface depends on wiring quality and is

usually not better than 500:1

7

Gas conversion is generated from the real gas calibration data using the combination of standard gases. Typical accuracy is 2%

m.v. / 0.2% FS (whichever is greater). Please contact Sensirion if better accuracy specification is required for your OEM project.

8

Pressure between flow inlet and ambient

9

Pressure between flow inlet and flow outlet. For availability of higher differential pressure option, contact Sensirion

10

to within

2 % of set point

All data, unless otherwise noted, apply for the following calibration conditions: Temperature 20°C, Nitrogen (N2), 3.0 bar overpressure (inlet: 4.0

bar absolute) against atmosphere (outlet: 1.0 bar absolute), horizontal mounting position (el. connector on top), downmount connection