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51367 Datasheet(PDF) 2 Page - Amphenol Corporation |
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51367 Datasheet(HTML) 2 Page - Amphenol Corporation |
2 / 2 page P1300 Low Pressure Sensor DieSpecifications Diedimentions(WxLxH):2.7mmX3.2mm -INa -INa +INa +INb +INb +INa -INb -INb -OUT +OUT -OUT +OUT Parameter Value Units Notes General PressureRanges 2.5 KPa »0.3psi 7 KPa »1psi MaximumOverpressure 5X ratedpressure ratedpressure Electrical @ 25°C (72°F) unless otherwise stated Excitation 1.5 mA 10VDCMax InputImpedance 5000±20% W OutputImpedance 5000±20% W Environmental TemperatureRange Operating -40to125 °C 40°Fto257°F Storage -55to150 °C -67°Fto302°F (Note6) Mechanical Weight 0.04 grams MediaCompatibility Clean,dryairnoncorrosivegases Performance Parameters (Note 1, 4) PressureRanges 2.5kPa 7kPa Units Value Value Notes ZeroOffset mV ±75 ±75 FullScaleOutput mV 30to 150 75to200 Linearity %FSO ±0.5 ±0.5 2 PressureHysteresis %FSO 0.2 0.2 TemperatureCoefficient ofZero mV/°C 30 30 3 TemperatureCoefficient ofResistance %/°C .38 .38 3 TemperatureCoefficient ofSensitivity %FSO/°C -0.2 -0.2 3 ThermalHysteresisofZero %FSO ±0.25 ±0.25 3,4 PositionSensitivity %FSO/g 0.2 0.1 5 Notes: 1. Allvaluesmeasurea25°C(77°F)and1.5mAexcitation,unlessotherwise noted. 2. Bestfitstraightline,51314±0.25%FSO 3. Typicalbetween0°Cand70°C(32°Fand158°F) 4. Dieperformancewillvarydependingonthedieattachmaterial.Thedie attachshouldbechosentominimizethepackagestresstransmittedtothe sensordie. 5. Typicalsensitivitywithsiliconegelontopofthedie 6. Dieonly.Doesnotincludetape,ringorcase. Ordering Information Part Number Description 51313 2.5kPaD/G(Noglass) 51314 7kPaD/G(Noglass) 51391 2.5kPaD/G(33milglass) 51392 7kPaD/G(33milglass) 51367 7kPaD/G(93milglass) Minimumreleasequality:2wafersorapproximately400dice(1wafer) Schematicandwirebonddiagram Description TheNovaSensorP1300piezoresistivepressureSensor Dieisofferedinaminiature2.7mmx3.2mmdie. Whenexcitedwith1.5mA,theP1300producesa millivoltoutputthatisproportionaltoinputpressure. Thesensorwilloperatewithaconstantvoltagesupply; however,thesensitivitywillchange–0.2%/°C.The P1300isavailableasadifferentialandgaugesensor. NovaSensor’sSenStable®processprovidesgoodlong- termstabilityandexcellentrepeatability. Thediesubstratemustbeconnectedtothepositive powersupplyinordertomaintaingoodlong-term stability.Toachievethis,+INaisconnectedtothe sensoraswellasthesubstratepad,whichislabeled withan“S.” Die Height (H) NoGlass 0.4mm 33mil 1.2mm 93mil 2.8mm AAS-920-440B-06/2014 www.amphenol-sensors.com ©2014AmphenolCorporation.AllRightsReserved.Specificationsaresubjecttochangewithoutnotice. Othercompanynamesandproductnamesusedinthisdocumentaretheregisteredtrademarksor trademarksoftheirrespectiveowners. Amphenol Advanced Sensors |
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