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51367 Datasheet(PDF) 2 Page - Amphenol Corporation

Part # 51367
Description  High reliability, solid state silicon pressure sensors
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Manufacturer  AMPHENOL [Amphenol Corporation]
Direct Link  http://www.amphenol.com
Logo AMPHENOL - Amphenol Corporation

51367 Datasheet(HTML) 2 Page - Amphenol Corporation

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P1300 Low Pressure Sensor
DieSpecifications
Diedimentions(WxLxH):2.7mmX3.2mm
-INa
-INa
+INa
+INb
+INb
+INa
-INb
-INb
-OUT
+OUT
-OUT
+OUT
Parameter
Value
Units
Notes
General
PressureRanges
2.5
KPa
»0.3psi
7
KPa
»1psi
MaximumOverpressure
5X
ratedpressure
ratedpressure
Electrical @ 25°C (72°F) unless otherwise stated
Excitation
1.5
mA
10VDCMax
InputImpedance
5000±20%
W
OutputImpedance
5000±20%
W
Environmental
TemperatureRange
Operating
-40to125
°C
40°Fto257°F
Storage
-55to150
°C
-67°Fto302°F
(Note6)
Mechanical
Weight
0.04
grams
MediaCompatibility
Clean,dryairnoncorrosivegases
Performance Parameters (Note 1, 4)
PressureRanges
2.5kPa 7kPa
Units
Value
Value
Notes
ZeroOffset
mV
±75
±75
FullScaleOutput
mV
30to
150
75to200
Linearity
%FSO
±0.5
±0.5
2
PressureHysteresis
%FSO
0.2
0.2
TemperatureCoefficient
ofZero
mV/°C
30
30
3
TemperatureCoefficient
ofResistance
%/°C
.38
.38
3
TemperatureCoefficient
ofSensitivity
%FSO/°C -0.2
-0.2
3
ThermalHysteresisofZero %FSO
±0.25
±0.25
3,4
PositionSensitivity
%FSO/g 0.2
0.1
5
Notes:
1. Allvaluesmeasurea25°C(77°F)and1.5mAexcitation,unlessotherwise
noted.
2. Bestfitstraightline,51314±0.25%FSO
3. Typicalbetween0°Cand70°C(32°Fand158°F)
4. Dieperformancewillvarydependingonthedieattachmaterial.Thedie
attachshouldbechosentominimizethepackagestresstransmittedtothe
sensordie.
5. Typicalsensitivitywithsiliconegelontopofthedie
6. Dieonly.Doesnotincludetape,ringorcase.
Ordering Information
Part Number
Description
51313
2.5kPaD/G(Noglass)
51314
7kPaD/G(Noglass)
51391
2.5kPaD/G(33milglass)
51392
7kPaD/G(33milglass)
51367
7kPaD/G(93milglass)
Minimumreleasequality:2wafersorapproximately400dice(1wafer)
Schematicandwirebonddiagram
Description
TheNovaSensorP1300piezoresistivepressureSensor
Dieisofferedinaminiature2.7mmx3.2mmdie.
Whenexcitedwith1.5mA,theP1300producesa
millivoltoutputthatisproportionaltoinputpressure.
Thesensorwilloperatewithaconstantvoltagesupply;
however,thesensitivitywillchange–0.2%/°C.The
P1300isavailableasadifferentialandgaugesensor.
NovaSensor’sSenStable®processprovidesgoodlong-
termstabilityandexcellentrepeatability.
Thediesubstratemustbeconnectedtothepositive
powersupplyinordertomaintaingoodlong-term
stability.Toachievethis,+INaisconnectedtothe
sensoraswellasthesubstratepad,whichislabeled
withan“S.”
Die Height (H)
NoGlass
0.4mm
33mil
1.2mm
93mil
2.8mm
AAS-920-440B-06/2014
www.amphenol-sensors.com
©2014AmphenolCorporation.AllRightsReserved.Specificationsaresubjecttochangewithoutnotice.
Othercompanynamesandproductnamesusedinthisdocumentaretheregisteredtrademarksor
trademarksoftheirrespectiveowners.
Amphenol
Advanced Sensors


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